Fabrication of nanofluidic devices using glass-to-glass anodic bonding
نویسندگان
چکیده
منابع مشابه
Fabrication and characterization of 20 nm planar nanofluidic channels by glass-glass and glass-silicon bonding.
We have characterized glass-glass and glass-Si bonding processes for the fabrication of wide, shallow nanofluidic channels with depths down to the nanometer scale. Nanochannels on glass or Si substrate are formed by reactive ion etching or a wet etching process, and are sealed with another flat substrate either by glass-glass fusion bonding (550 degrees C) or an anodic bonding process. We demon...
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ژورنال
عنوان ژورنال: Sensors and Actuators A: Physical
سال: 2004
ISSN: 0924-4247
DOI: 10.1016/j.sna.2003.12.027